Imec installs world’s most advanced chip production machine in Leuven
Belgian research centre imec has begun installing the world’s most advanced chip production machine in its cleanroom in Leuven. The system, a High NA EUV lithography machine developed by Dutch technology company ASML, is expected to enable the development of smaller and more powerful semiconductor chips.
According to imec, the installation marks a significant step towards the “angstrom era”, in which chip structures will be up to 10 times smaller than they are today. This level of miniaturisation is considered essential for supporting future applications of artificial intelligence.
“Today we are not just installing a device; we are opening a new chapter in the digital revolution,” said imec CEO Luc Van den hove. “High NA EUV lithography will be essential to usher the chip industry into the angstrom era. These ultra-small dimensions are crucial to enable the AI applications of the future.”
The machine uses extreme ultraviolet light combined with a higher numerical aperture, allowing even finer patterns to be “printed” onto silicon wafers. This enables increased computing power and efficiency within the same surface area.
Technological milestone
The device, roughly the size of a city bus and weighing around 150 tonnes, is being transported to Leuven in multiple parts.
ASML also underlined the significance of the milestone. “The installation at imec is an important step towards the angstrom era,” said ASML CEO Christophe Fouquet. “Together, we are accelerating the further development and deployability of High NA EUV for the next generations of advanced memory and computing chips.”
Leuven is the first location in Europe where a High NA EUV machine is being integrated into a production line. The project forms part of a broader collaboration between imec and ASML, supported by the Flemish and Dutch governments as well as European programmes.
“As an essential part of the NanoIC pilot line, the device will enable Europe to play a major role in the global chip ecosystem over the coming decades,” said Van den hove.
According to Flemisn minister president Matthias Diependaele, the installation also highlights the sector’s strategic importance.
“Artificial intelligence and semiconductors form the backbone of our economic prosperity, security and strategic autonomy,” he said. “With this installation, imec confirms its role as the linchpin of the global chip ecosystem and allows Europe to help determine the direction of AI innovation.”
#FlandersNewsService | Installation of a chip machine at imec in Leuven, 18 March 2026 © BELGA PHOTO SARAH VAN HECKE
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